l 國家科技部國際合作專項項目,大尺寸碳化硅的激光化學氣相沉積技術及應用合作研發,2014/12-2017/11。
l 國際企業委托項目,鹵化物化學氣相沉積法制備Ti-Si-C復合材料厚膜成型技術,2015/01-2015/12。
l 國家自然科學基金項目,雙激光化學氣相沉積法制備刀具超硬涂層,2019.1-2022.12
l 國際合作項目,SiCN涂層的生物和血液相容性,2019.1-2021.12
代表性學術
成果
1 Q. Sun, P. Zhu, Q. Xu, R. Tu, S. Zhang, J. Shi, H. Li, L. Zhang, et al., “High-speed heteroepitaxial growth of 3C-SiC (111) thick films on Si (110) by laser chemical vapor deposition,” Journal of the American Ceramic Society, 101 [1] 1048–1057 (2018).
2 Q. Xu, P. Zhu, Q. Sun, R. Tu, S. Zhang, M. Yang, Q. Li, J. Shi, et al., “Fast preparation of (111)-oriented β-SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane without H2,” Journal of the American Ceramic Society, 101 [2] 1471–1478 (2018).
3 P. Zhu, M. Yang, Q. Xu, Q. Sun, R. Tu, J. Li, S. Zhang, Q. Li, et al., “Epitaxial growth of 3C-SiC on Si(111) and (001) by laser CVD,” Journal of the American Ceramic Society, 101 [9] 3850–3856 (2018).
4 P. Zhu, Q. Xu, R. Chen, S. Zhang, M. Yang, R. Tu, L. Zhang, T. Goto, et al., “Structural study of β-SiC(001) films on Si(001) by laser chemical vapor deposition,” Journal of the American Ceramic Society, 100 [4] 1634–1641 (2017).
5 R. Tu, D. Zheng, Q. Sun, M. Han, S. Zhang, Z. Hu, T. Goto, and L. Zhang, “Ultra-Fast Fabrication of <110>-Oriented β-SiC Wafers by Halide CVD,” Journal of the American Ceramic Society, 99 [1] 84–88 (2016).
6. Tu, Rong,Li, Nian,Li, Qizhong,Zhang, Song,Zhang, Lianmeng,Goto, TakashiMicrostructure and mechanical properties of B4C-HfB2-SiC ternary eutectic composites prepared by arc melting,Journal of the European Ceramic Society,2016,36(4):959-966。
7. Tu, Rong,Li, Nian,Li, Qizhong,Zhang, Song,Zhang, Lianmeng,Goto, TakashiEffect of microstructure on mechanical, electrical and thermal properties of B4C-HfB2 composites prepared by arc melting,Journal of the European Ceramic Society,2016,36(16):3929-3937。
8 R. Tu, Q. Sun, S. Zhang, M. Han, Q. Li, H. Hirayama, L. Zhang, and T. Goto, “Oxidation Behavior of ZrB2-SiC Composites at Low Pressures,” Journal of the American Ceramic Society, 98 [1] 214–222 (2015).
9 S. Zhang, Q. Xu, R. Tu, T. Goto, and L. Zhang, “Growth Mechanism and Defects of <111>-Oriented β-SiC Films Deposited by Laser Chemical Vapor Deposition,” Journal of the American Ceramic Society, 98 [1] 236–241 (2015).
10 S. Zhang, Q. Xu, Q. Sun, P. Zhu, R. Tu, Z. Hu, M. Han, T. Goto, et al., “Effect of Pressure on Microstructure of <111>-Oriented β-SiC Films: Research Via Electron Backscatter Diffraction,” Journal of the American Ceramic Society, 98 [12] 3713–3718 (2015).